Omega/Theta XRD

Highlights

Established Omega-scan method

• Highest precision

• Measurement speed: < 5 secs/sample 

• Easy integration into process line

• MES and/or SECS/GEM interfaces

• Typical standard deviation tilt (example: Si 100):   < 0.003 °, minimum < 0.001 °

The Omega/Theta X-ray diffractometer is a fully automated vertical three axes diffractometer for orientation determination for various crystals using Omega-Scan and Theta-Scan methods and rocking curve measurements. The large and spacious design can accommodate samples and sample holders up to 450 mm in length and up to 30 kg weight.

All measurements are automated and can be accessed from the user-friendly software interface. Using the Omega Scan, the complete lattice orientation can be determined in one crystal rotation (5 seconds). The Theta Scan is more flexible, but results only in one orientation component per scan.

The tilt angle can be determined with very high precision; up to 0.001° using the Theta Scan. For all other crystal directions, the precision depends on the angular difference to the perpendicular surface.

The system is modular and has been equipped with many different extensions for special purposes like shape or flat determination, mapping and diverse sample holders. The sample tilt is detected by an optical measurement, and can be used to correct the resulting orientation.

Add ons

Single crystal diffractometer

• Fully automated complete lattice orientation measurement of single crystals

• Ultra-fast crystal orientation measurement using Omega-scan method

• Automated rocking-curve measurement

• Angular resolution of the diffractometer: 0.1 arc sec.

• Sample size up to 450 mm

• Appropriate for production quality control and research

User friendly and cost effective

• Convenient sample handling and easy to operate

• Advanced, user-friendly software

• Low energy consumption and operating costs

Modular design and flexibility

• Various upgrade options

• Customization to the users' requirements