Fully automated quartz wafer analyzingmachine
Samples:
Round, rectangular & square
4 x 4 mm up to 80 x 80 mm (manual sample handling)
20 x 20 mm up to 80 x 80 mm (automatic sample handling)
Features:
Mapping option for spatial quality check
Modular design allows future automation upgrade
Standard sample holders for input/output: cassettes or stacks
Sorting function available
Throughput: up to 350 wafers/h at standard sorting accuracy
ESR5000 Benchtop ESR / EPR Spectrometer (Formerly MS-5000)
microESR Benchtop ESR / EPR Spectrometer
Lexsyg Research Imaging TL-OSL-RF System
Lexsyg Smart TL / OSL Reader
Omega/Theta XRD