Flexible OEM unit for lifetime measurements at a variety of different samples ranging from mono- to multicrystalline silicon bricks, from as-grown wafers to process control of wafers with different layers or metallization. Standard software interface for easy connection to many handling or automatization systems.
MDPlinescan is designed as an easy to integrate OEM unit for integration into a variety of automated inspection lines. Key measurements are carrier lifetime scans on the fly. Samples are usually carried by a conveyor belt or robot system underneath the measurement head. Application examples range from brick to wafer inspection with measurement speed of less than one second per wafer. Incoming material quality investigation in cell production lines are frequent application cases as well as process quality check after passivation and diffusion, within many other specialized application possibilities. Easy to integrate only ethernet connection and power is needed.
MDPlinescan wIncludes additional resistivity measurement option.
allows for single wafer investigation
recipe based measurements
monitoring of material quality, process integrity and stability
Measurement of minority carrier lifetime and resistivity lines cans at µ-PCD or steady state excitation conditions are in the focus of this small tool.
OEM unit for the integration in production lines for multi- or monocrystalline silicon wafers at different preparation stages up to devices, bricks or ingots.
Small size and standard automation interfaces allow for easy integration. Focus is put on long reliability and precision of measurement results.
allows for single wafer control
monitoring of material, process quality and stability
HR-SPS with a variable energy excitation source
HR-SPS with fixed energy excitation sources
MDpicts
MDPmap
MDPpro
