Low cost tabletop single spot measurements on wafers or bricks.
Low-cost tabletop lifetime measurement system for characterization of a variety of different silicon samples at different preparation stages, without built-in automatization. Optional hand operated z-axis for thicker samples up to 156 mm bricks. Standard software for result visualization.
MDPspot wIncludes an additional resistivity measurement option. Resistivity measurements for silicon only, either for wafers without height adjustment possibility, or for bricks. One of these two options has to be predefined.
contactless destruction free electrical semiconductor characterization
μ-PCD measurement option included
advanced sensitivity for visualization of so far invisible defects and investigations of epitaxial layers
integration of up to four lasers for a wide range of injection levels
access to primary data of single transients as well as maps for special evaluation purposes
Spot size variation
Resistivity measurement (wafers)
Background/Bias light
Reflection measurement (MDP)
Software extension
Additional lasers
Tabletop unit for single point measurements of carrier lifetime, multi- or mono-crystalline silicon at different preparation stages, from as- grown up to final devices.
Small size, low cost and easy to use. Comes with a basic software for result visualization on a small PC or notebook.
Suitable for wafers up to bricks, with easy to handle height adjustment.
allows for single wafer investigation
different recipes for different wafer classes
monitoring of material, process quality and stability
HR-SPS with a variable energy excitation source
HR-SPS with fixed energy excitation sources
MDpicts
MDPlinescan
MDPmap
